Length Measurement Systems from DYNEOS AG

Our sensors and systems allow contactless positon measurements with sub-nm resolution. The product range includes complete Michelson-Interferometers (1, 2 or 3 beams) to measure distances and angles and vibrations (Vibrometers that are based on the same principle). These instruments include miniaturized Laser-Interferometers using a fiber-coupled HeNe Laser as light source. Sophisticated stabilization technique of the laser frequency and correction of the wavelength by measuring the environmental parameters (temperature, air pressure and rel. humidity) lead to very precise length measurements.

Please be aware that the lab requirements are very high if you want measure in the nm range. As a complete Nano-Measuring System the NNM-1 has a measuring range of 25mm x 25mm x 5mm with a resolution of 0.1nm ! All 3 axes are measured and controlled with integrated interferometers. For OEM customers we offer capacitive sensors to be integrated into position control loops. They can measure up to several 100μm and are also used in our nanopositioning systems from PI.