Stages with Air Bearings from DYNEOS AG

Air bearing stages are used where vibration-free motion is required, velocity needs to be highly constant, and optimum angular repeatability is requested. Air bearings avoid friction, wear, and backlash effects. PIglide linear, rotary and spherical bearings are precision components that can be integrated and motorized for applications in OEM, industrial, and research markets.
The PIglide Air Bearing Technology offers frictionless high-precision in the nanometer range. This allows stable scanning with high speed with Direct Drive linear & torque motors, excellent guiding accuracies and active yaw control for gantries.

The Air Bearing Stages portfolio covers Linear Stages Nanopositioning systems, which are cleanroom compatible, with an acceleration of up to 80m/s² and travel ranges ranging from 25mm up to 750mm. XY Positioning Systems with up to 500mm x 1000mm travel ranges, high load capacities of up to 245N, velocities of up to 2m/s and accelerations of up to 27.5m/s². The Rotation Stages with Air Bearings have platform diameters between 50mm and 300mm, load capacities of up to 4'170N and maximal velocities of 2'500rpm.
Fields of application are high-precision applications such as metrology, photonics, precision scanning in semiconductor or flat panel display manufacturing, optical adjustment, inspection systems and microscopy.